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If you are maintaining a legacy XPS system from the early 2000s, or if you have terabytes of old .spe files that need re-analysis, the xpspeak41 software download is still a vital tool. It is fast, free, and requires zero learning curve for those trained on it.
Go to > Export to save the fitted parameters and the individual peak curves. xpspeak41 software download
If you cannot find a safe download or the software is too outdated, consider modern alternatives depending on its function: If you are maintaining a legacy XPS system
XPSPEAK 4.1 remains a reliable, "old-school" favorite for researchers who need a straightforward, free tool for deconvolution without the high cost of commercial suites like CasaXPS. While newer open-source alternatives like are becoming popular for their updated features, XPSPEAK is still frequently cited in modern peer-reviewed literature for its core fitting accuracy. If you cannot find a safe download or
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